MEMS production, furnace processing
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MEMS production, furnace processing
MEMS production. Row of silicon wafers entering a furnace during the process of producing MEMS (microelectromechanical systems) devices. The wafers are being placed in the furnace so that they can be thermally oxidised. This helps to fix the structure of the devices deposited and etched on their surfaces. MEMS devices are constructed on a microscopic scale using technologies such as wet and dry etching and thin film deposition. Applications include sensors and optical displays. Materials used to construct MEMS devices include silicon and polymers such as plastics. Photographed at an INEX facility. INEX is a British microsystems and nanotechnology company that was founded in 2002
Science Photo Library features Science and Medical images including photos and illustrations
Media ID 6438001
© COLIN CUTHBERT/SCIENCE PHOTO LIBRARY
2007 Clean Room Component Components Deposition Device Devices Electronics Factory Films Furnace Hi Tech Inex Manufacture Mechanical Mechanics Mems Mems Device Micro Microelectromechanical Systems Micromechanical Micromechanics Microsystems Plates Production Semi Conductor Sensor Sensors Silicon Silicon Plate Thin Film Wafer Wafers Laboratory
EDITORS COMMENTS
This print captures the intricate process of MEMS production at an INEX facility. The image showcases a row of silicon wafers entering a high-tech furnace, where they undergo thermal oxidation to solidify the structure of microelectromechanical systems (MEMS) devices. These cutting-edge devices are constructed on a microscopic scale using advanced technologies like wet and dry etching and thin film deposition. MEMS technology finds its applications in various fields, including sensors and optical displays. The materials employed in constructing these devices range from silicon to polymers such as plastics, enabling their versatility and functionality. The photograph not only highlights the industrial nature of this factory setting but also emphasizes the significance of research and technological advancements in the 21st century. It showcases the meticulousness involved in manufacturing MEMS components, with clean rooms ensuring precision throughout every step. Science Photo Library has expertly captured this moment within an INEX facility, showcasing their commitment to providing high-quality images that showcase scientific breakthroughs without commercial intent. This photo serves as a testament to the incredible strides made in micromechanics and semiconductor technology, pushing boundaries for innovation across industries worldwide.
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